@incollection{Zhou20,
author = {Wu Zhou and Jiangbo He and Peng Peng and Lili Chen and Kaicong Cao},
title = {Reliability of Microelectromechanical Systems Devices},
booktitle = {Reliability and Maintenance},
publisher = {IntechOpen},
address = {Rijeka},
year = {2020},
editor = {Leo Kounis},
chapter = {5},
doi = {10.5772/intechopen.86754},
url = {https://doi.org/10.5772/intechopen.86754}
}