@incollection{Hu19,
author = {Chuxiong Hu and Yu Zhu and Luzheng Liu},
title = {Self-Calibration of Precision XY<em>θ<sub>z</sub></em> Metrology Stages},
booktitle = {Standards, Methods and Solutions of Metrology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2019},
editor = {Luigi Cocco},
chapter = {2},
doi = {10.5772/intechopen.85539},
url = {https://doi.org/10.5772/intechopen.85539}
}