@incollection{Lin09,
author = {Yi-Chuen Eng and Jyi-Tsong Lin},
title = {Self-Aligned π-Shaped Source/Drain Ultrathin SOI MOSFETs},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {15},
doi = {10.5772/7014},
url = {https://doi.org/10.5772/7014}
}