@incollection{Shtereva09,
author = {Krasimira Shtereva and Vladimir Tvarozek and Pavel Sutta and Jaroslav Kovac and Ivan Novotny},
title = {Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {14},
doi = {10.5772/7013},
url = {https://doi.org/10.5772/7013}
}