@incollection{Gorobchuk09,
author = {Yurii N. Grigoryev and Aleksey G. Gorobchuk},
title = {Numerical Simulation of Plasma-Chemical Processing Semiconductors},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {13},
doi = {10.5772/7012},
url = {https://doi.org/10.5772/7012}
}