@incollection{Stanimirović09,
author = {Ivanka Stanimirović and Zdravko Stanimirović},
title = {Reliability of MEMS},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {12},
doi = {10.5772/7011},
url = {https://doi.org/10.5772/7011}
}