@incollection{Stanimirović09,
author = {Zdravko Stanimirović and Ivanka Stanimirović},
title = {Mechanical Properties of MEMS Materials},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {11},
doi = {10.5772/7010},
url = {https://doi.org/10.5772/7010}
}