@incollection{Il’in19,
author = {Oleg I. Il’in and Marina V. Il’ina and Nikolay N. Rudyk and Alexandr A. Fedotov and Oleg A. Ageev},
title = {Vertically Aligned Carbon Nanotubes Production by PECVD},
booktitle = {Perspective of Carbon Nanotubes},
publisher = {IntechOpen},
address = {Rijeka},
year = {2019},
editor = {Hosam El-Din Saleh and Said Moawad Mohamed El-Sheikh},
chapter = {5},
doi = {10.5772/intechopen.84732},
url = {https://doi.org/10.5772/intechopen.84732}
}