@incollection{Takahata09,
author = {Kenichi Takahata},
title = {Micro-Electro-Discharge Machining Technologies for MEMS},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {10},
doi = {10.5772/7009},
url = {https://doi.org/10.5772/7009}
}