@incollection{Noda09,
author = {Daiji Noda and Masaru Setomoto and Tadashi Hattori},
title = {Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {9},
doi = {10.5772/7008},
url = {https://doi.org/10.5772/7008}
}