@incollection{Matovic09, author = {Zoran Jakšić and Jovan Matovic}, title = {Nanomembrane-Enabled MEMS Sensors: Case of Plasmonic Devices for Chemical and Biological Sensing}, booktitle = {Micro Electronic and Mechanical Systems}, publisher = {IntechOpen}, address = {Rijeka}, year = {2009}, editor = {Kenichi Takahata}, chapter = {6}, doi = {10.5772/7005}, url = {https://doi.org/10.5772/7005} }