@incollection{Jakšić09,
author = {Jovan Matovic and Zoran Jakšić},
title = {Nanomembrane: A New MEMS/NEMS Building Block},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {5},
doi = {10.5772/7004},
url = {https://doi.org/10.5772/7004}
}