@incollection{Ikuta09,
author = {Masashi Ikeuchi and Koji Ikuta},
title = {Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice},
booktitle = {Micro Electronic and Mechanical Systems},
publisher = {IntechOpen},
address = {Rijeka},
year = {2009},
editor = {Kenichi Takahata},
chapter = {1},
doi = {10.5772/7000},
url = {https://doi.org/10.5772/7000}
}