@incollection{Wu19,
author = {Jiye Yang and Tao Wu},
title = {Silicon-Based Micromachining Process for Flexible Electronics},
booktitle = {Micromachining},
publisher = {IntechOpen},
address = {Rijeka},
year = {2019},
editor = {Zdravko Stanimirović and Ivanka Stanimirović},
chapter = {3},
doi = {10.5772/intechopen.83347},
url = {https://doi.org/10.5772/intechopen.83347}
}