@incollection{Kralkina19,
author = {Elena Kralkina and Andrey Alexandrov and Polina Nekludova and Aleksandr Nikonov and Vladimir Pavlov and Konstantin Vavilin and Vadim Odinokov and Vadim Sologub},
title = {Physical Processes and Plasma Parameters in a Radio-Frequency Hybrid Plasma System for Thin-Film Production with Ion Assistance},
booktitle = {Micromachining},
publisher = {IntechOpen},
address = {Rijeka},
year = {2019},
editor = {Zdravko Stanimirović and Ivanka Stanimirović},
chapter = {5},
doi = {10.5772/intechopen.82870},
url = {https://doi.org/10.5772/intechopen.82870}
}