@incollection{Lee18,
author = {Yi-Lung Cheng and Chih-Yen Lee},
title = {Porous Low-Dielectric-Constant Material for Semiconductor Microelectronics},
booktitle = {Nanofluid Flow in Porous Media},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Mohsen Sheikholeslami Kandelousi and Sadia Ameen and M. Shaheer Akhtar and Hyung-Shik Shin},
chapter = {11},
doi = {10.5772/intechopen.81577},
url = {https://doi.org/10.5772/intechopen.81577}
}