@incollection{Muñoz-Rojas19,
author = {David Muñoz-Rojas and Viet Huong Nguyen and César Masse de la Huerta and Carmen Jiménez and Daniel Bellet},
title = {Spatial Atomic Layer Deposition},
booktitle = {Chemical Vapor Deposition for Nanotechnology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2019},
editor = {Pietro Mandracci},
chapter = {1},
doi = {10.5772/intechopen.82439},
url = {https://doi.org/10.5772/intechopen.82439}
}