@incollection{Machida18,
author = {Katsuyuki Machida and Toshifumi Konishi and Daisuke Yamane and Hiroshi Toshiyoshi
and Hiroyuki Ito},
title = {Multi-Physics Simulation Platform and Multi-Layer Metal Technology for CMOS-MEMS Accelerometer with Gold Proof Mass},
booktitle = {Novel Metal Electrodeposition and the Recent Application},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Masato Sone and Kazuya Masu},
chapter = {8},
doi = {10.5772/intechopen.81832},
url = {https://doi.org/10.5772/intechopen.81832}
}