@incollection{Shi18,
author = {Feng Shi},
title = {Introductory Chapter: Basic Theory of Magnetron Sputtering},
booktitle = {Magnetron Sputtering},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Dr. Feng Shi},
chapter = {4},
doi = {10.5772/intechopen.80550},
url = {https://doi.org/10.5772/intechopen.80550}
}