@incollection{Daraban18,
author = {Gheorghe Popan and Ana Elisabeta Oros Daraban},
title = {Flexible Control in Nanometrology},
booktitle = {Applied Modern Control},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Le Anh Tuan},
chapter = {2},
doi = {10.5772/intechopen.80425},
url = {https://doi.org/10.5772/intechopen.80425}
}