@incollection{Cheng18,
author = {Yi-Lung Cheng and Chih-Yen Lee and Chiao-Wei Haung},
title = {Plasma Damage on Low-k Dielectric Materials},
booktitle = {Plasma Science and Technology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Haikel Jelassi and Djamel Benredjem},
chapter = {15},
doi = {10.5772/intechopen.79494},
url = {https://doi.org/10.5772/intechopen.79494}
}