@incollection{Aizawa18,
author = {Tatsuhiko Aizawa},
title = {Controlled Post-treatment of Thick CVD-Diamond Coatings by High-Density Plasma Oxidation},
booktitle = {Chemical Vapor Deposition for Nanotechnology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Pietro Mandracci},
chapter = {4},
doi = {10.5772/intechopen.79143},
url = {https://doi.org/10.5772/intechopen.79143}
}