@incollection{Yao18,
author = {Huaxiang Yin and Jiaxin Yao},
title = {Advanced Transistor Process Technology from 22- to 14-nm Node},
booktitle = {Complementary Metal Oxide Semiconductor},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Kim Ho Yeap and Humaira Nisar},
chapter = {2},
doi = {10.5772/intechopen.78655},
url = {https://doi.org/10.5772/intechopen.78655}
}