@incollection{Erben18,
author = {Elke Erben and Klaus Hempel and Dina Triyoso},
title = {Work Function Setting in High-k Metal Gate Devices},
booktitle = {Complementary Metal Oxide Semiconductor},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Kim Ho Yeap and Humaira Nisar},
chapter = {3},
doi = {10.5772/intechopen.78335},
url = {https://doi.org/10.5772/intechopen.78335}
}