@incollection{Ohtsu18,
author = {Yasunori Ohtsu},
title = {Physics of High-Density Radio Frequency Capacitively Coupled Plasma with Various Electrodes and Its Applications},
booktitle = {Plasma Science and Technology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Haikel Jelassi and Djamel Benredjem},
chapter = {11},
doi = {10.5772/intechopen.78387},
url = {https://doi.org/10.5772/intechopen.78387}
}