@incollection{Egorov18, author = {Vladimir Egorov and Evgeny Egorov}, title = {Ion Beams for Materials Analysis: Conventional and Advanced Approaches}, booktitle = {Ion Beam Applications}, publisher = {IntechOpen}, address = {Rijeka}, year = {2018}, editor = {Ishaq Ahmad and Malik Maaza}, chapter = {3}, doi = {10.5772/intechopen.76297}, url = {https://doi.org/10.5772/intechopen.76297} }