@incollection{Khuchua18,
author = {Nina Khuchua and Marina Tigishvili and Nugzar Dolidze and Zurab Jibuti and Revaz
Melkadze and Roland Diehl},
title = {Ion Implantation as a Tool for Controlled Modification of Photoelectrical Properties of Silicon},
booktitle = {Ion Beam Applications},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Ishaq Ahmad and Malik Maaza},
chapter = {7},
doi = {10.5772/intechopen.76992},
url = {https://doi.org/10.5772/intechopen.76992}
}