@incollection{Ishida08, author = {Hidekuni Takao and Makoto Ishida}, title = {Three-Dimensional Silicon Smart Tactile Imager Using Large Deformation of Swollen Diaphragm with Integrated Piezoresistor Pixel Circuits}, booktitle = {Sensors}, publisher = {IntechOpen}, address = {Rijeka}, year = {2008}, editor = {Jose Gerardo Rocha and Senentxu Lanceros-Mendez}, chapter = {4}, doi = {10.5772/6616}, url = {https://doi.org/10.5772/6616} }