@incollection{Wang18,
author = {Guilei Wang and Henry H. Radamson and Mohammadreza Kolahdouz},
title = {Selective Epitaxy of Group IV Materials for CMOS Application},
booktitle = {Complementary Metal Oxide Semiconductor},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Kim Ho Yeap and Humaira Nisar},
chapter = {4},
doi = {10.5772/intechopen.76244},
url = {https://doi.org/10.5772/intechopen.76244}
}