@incollection{Jennings18, author = {Fan Li and Mike Jennings}, title = {Main Differences in Processing Si and SiC Devices}, booktitle = {Disruptive Wide Bandgap Semiconductors, Related Technologies, and Their Applications}, publisher = {IntechOpen}, address = {Rijeka}, year = {2018}, editor = {Yogesh Kumar Sharma}, chapter = {3}, doi = {10.5772/intechopen.76293}, url = {https://doi.org/10.5772/intechopen.76293} }