@incollection{Li18, author = {Huiliang Cao and Jianhua Li}, title = {Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation}, booktitle = {MEMS Sensors}, publisher = {IntechOpen}, address = {Rijeka}, year = {2018}, editor = {Siva Yellampalli}, chapter = {1}, doi = {10.5772/intechopen.74364}, url = {https://doi.org/10.5772/intechopen.74364} }