@incollection{Liu18,
author = {Hai-peng Liu and Lei Jin and Shi-qiao Gao and Shao-hua Niu},
title = {Integrated Power Supply for MEMS Sensor},
booktitle = {MEMS Sensors},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Siva Yellampalli},
chapter = {2},
doi = {10.5772/intechopen.74804},
url = {https://doi.org/10.5772/intechopen.74804}
}