@incollection{Wu18,
author = {Shumin Yang and Yanqing Wu},
title = {EUV/Soft X-Ray Interference Lithography},
booktitle = {Micro/Nanolithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Jagannathan Thirumalai},
chapter = {5},
doi = {10.5772/intechopen.74564},
url = {https://doi.org/10.5772/intechopen.74564}
}