@incollection{Kim18,
author = {Hong Jin Kim},
title = {Abrasive for Chemical Mechanical Polishing},
booktitle = {Abrasive Technology},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Anna Rudawska},
chapter = {10},
doi = {10.5772/intechopen.75408},
url = {https://doi.org/10.5772/intechopen.75408}
}