@incollection{Miyake18, author = {Mei Wang and Shojiro Miyake}, title = {Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering}, booktitle = {Tribology, Lubricants and Additives}, publisher = {IntechOpen}, address = {Rijeka}, year = {2018}, editor = {David W. Johnson}, chapter = {5}, doi = {10.5772/intechopen.73141}, url = {https://doi.org/10.5772/intechopen.73141} }