@incollection{Soydan18,
author = {Bahadir Tunaboylu and Ali M. Soydan},
title = {MEMS Technologies Enabling the Future Wafer Test Systems},
booktitle = {MEMS Sensors},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Siva Yellampalli},
chapter = {9},
doi = {10.5772/intechopen.73144},
url = {https://doi.org/10.5772/intechopen.73144}
}