@incollection{Thirumalai18,
author = {Jagannathan Thirumalai},
title = {Introductory Chapter: The Eminence of Lithography—New Horizons of Next-Generation Lithography},
booktitle = {Micro/Nanolithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Jagannathan Thirumalai},
chapter = {1},
doi = {10.5772/intechopen.70725},
url = {https://doi.org/10.5772/intechopen.70725}
}