@incollection{Awad17,
author = {Ahmed Awad and Atsushi Takahashi and Chikaaki Kodaman},
title = {Optical Proximity Correction (OPC) Under Immersion Lithography},
booktitle = {Micro/Nanolithography},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Jagannathan Thirumalai},
chapter = {6},
doi = {10.5772/intechopen.72699},
url = {https://doi.org/10.5772/intechopen.72699}
}