@incollection{Cheng18,
author = {Yi-Lung Cheng and Chih-Yen Lee and Yao-Liang Huang},
title = {Copper Metal for Semiconductor Interconnects},
booktitle = {Noble and Precious Metals},
publisher = {IntechOpen},
address = {Rijeka},
year = {2018},
editor = {Mohindar Singh Seehra and Alan D. Bristow},
chapter = {10},
doi = {10.5772/intechopen.72396},
url = {https://doi.org/10.5772/intechopen.72396}
}