@incollection{Chao17,
author = {Yu-Faye Chao},
title = {The Development of Three-Intensity Measurement in PSA Ellipsometry and Photoelastic Modulation Ellipsometry},
booktitle = {Ellipsometry},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Faustino Wahaia},
chapter = {3},
doi = {10.5772/intechopen.70086},
url = {https://doi.org/10.5772/intechopen.70086}
}