@incollection{Li17,
author = {Ning Li and Hitoshi Habuka and Yuuki Ishida and Shin-ichi Ikeda and Shiro Hara},
title = {Silicon Epitaxial Reactor for Minimal Fab},
booktitle = {Epitaxy},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Miao Zhong},
chapter = {6},
doi = {10.5772/intechopen.69986},
url = {https://doi.org/10.5772/intechopen.69986}
}