@incollection{Glebovsky17,
author = {Vadim Glebovsky},
title = {High-purity Refractory Metals for Thin Film Metallization of VLSI},
booktitle = {Very-Large-Scale Integration},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Kim Ho Yeap and Humaira Nisar},
chapter = {4},
doi = {10.5772/intechopen.69126},
url = {https://doi.org/10.5772/intechopen.69126}
}