@incollection{Pustan17,
author = {Marius Pustan and Cristian Dudescu and Corina Birleanu and Florina Rusu},
title = {Nanocharacterization of the Mechanical and Tribological Behavior of MEMS Micromembranes},
booktitle = {Nanomechanics},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Alexander Vakhrushev},
chapter = {5},
doi = {10.5772/intechopen.68292},
url = {https://doi.org/10.5772/intechopen.68292}
}