@incollection{Ghita17,
author = {Rodica V. Ghita and Constantin Logofatu and Constantin-Catalin Negrila and 
Lucian Trupina and Costel Cotirlan-Simioniuc},
title = {Surface Modification of III-V Compounds Substrates for Processing Technology},
booktitle = {Nanoscaled Films and Layers},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Laszlo Nanai},
chapter = {5},
doi = {10.5772/67916},
url = {https://doi.org/10.5772/67916}
}