@incollection{Fedorenko17,
author = {Yanina G. Fedorenko},
title = {Ion-Beam-Induced Defects in CMOS Technology: Methods of Study},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Ishaq Ahmad},
chapter = {4},
doi = {10.5772/67760},
url = {https://doi.org/10.5772/67760}
}