@incollection{Dmitriev17,
author = {Sonia B. Kaschieva and Sergey N. Dmitriev},
title = {MeV Electron Irradiation of Ion-Implanted Si-SiO2 Structures},
booktitle = {Ion Implantation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Ishaq Ahmad},
chapter = {3},
doi = {10.5772/67761},
url = {https://doi.org/10.5772/67761}
}