@incollection{Giaccherini17,
author = {Andrea Giaccherini and Roberto Felici and Massimo Innocenti},
title = {Operando Structural Characterization of the E-ALD Process Ultra-Thin Films Growth},
booktitle = {X-ray Characterization of Nanostructured Energy Materials by Synchrotron Radiation},
publisher = {IntechOpen},
address = {Rijeka},
year = {2017},
editor = {Mehdi Khodaei and Luca Petaccia},
chapter = {3},
doi = {10.5772/67355},
url = {https://doi.org/10.5772/67355}
}