@incollection{Nebogatikova17, author = {Irina V. Antonova and Nadezhda A. Nebogatikova}, title = {Fluorinated Graphene Dielectric and Functional Layers for Electronic Applications}, booktitle = {Graphene Materials}, publisher = {IntechOpen}, address = {Rijeka}, year = {2017}, editor = {George Z. Kyzas and Athanasios Ch. Mitropoulos}, chapter = {11}, doi = {10.5772/67451}, url = {https://doi.org/10.5772/67451} }