@incollection{Tang17, author = {Yang Tang}, title = {Modern Technologies for Creating Nanostructures in Thinā€Film Solar Cells}, booktitle = {Modern Technologies for Creating the Thin-film Systems and Coatings}, publisher = {IntechOpen}, address = {Rijeka}, year = {2017}, editor = {Nikolay N. Nikitenkov}, chapter = {17}, doi = {10.5772/66968}, url = {https://doi.org/10.5772/66968} }