@incollection{Giannetta17, author = {Hernan M. R. Giannetta and Carlos Calaza and Liliana Fraigi and Luis Fonseca}, title = {Vanadium Oxide Thin Films Obtained by Thermal Annealing of Layers Deposited by RF Magnetron Sputtering at Room Temperature}, booktitle = {Modern Technologies for Creating the Thin-film Systems and Coatings}, publisher = {IntechOpen}, address = {Rijeka}, year = {2017}, editor = {Nikolay N. Nikitenkov}, chapter = {9}, doi = {10.5772/67054}, url = {https://doi.org/10.5772/67054} }